Ukubuka Konke kwe-Photoresist
I-Photoresist, eyaziwa nangokuthi i-photoresist, ibhekisela ezintweni ezincane zefilimu ezishintsha ukuncibilika kwazo lapho zivezwa ekukhanyeni kwe-UV, imisebe ye-electron, imisebe ye-ion, ama-X-ray, noma eminye imisebe.
Yakhiwe yi-resin, i-photoinitiator, i-solvent, i-monomer, nezinye izithasiselo (bheka Ithebula 1). I-resin ye-Photoresist kanye ne-photoinitiator yizinto ezibaluleke kakhulu ezithinta ukusebenza kwe-photoresist. Isetshenziswa njengesembozo sokulwa nokugqwala ngesikhathi senqubo ye-photolithography.
Lapho kucutshungulwa izindawo ze-semiconductor, ukusebenzisa i-photoresist ekhethiwe kahle kungadala isithombe esifiselekayo ebusweni.
Ithebula 1.
| Izithako ze-Photoresist | Ukusebenza |
| Isinyibilikisi | Kwenza ukumelana ne-photoresist kube uketshezi futhi kube nokuguquguquka, futhi akunawo umthelela cishe ezicini zamakhemikhali ze-photoresist. |
| Umqalisi wesithombe | Yaziwa nangokuthi i-photosensitizer noma i-photocuring agent, iyisakhi esizwela ukukhanya ezintweni ezimelana ne-photoresist. Luhlobo lwenhlanganisela engabola ibe ama-free radical noma ama-cation futhi iqale ukusabela kwamakhemikhali okuxhumanisa kuma-monomers ngemuva kokumunca amandla okukhanya abonakalayo noma abonakalayo we-wavelength ethile. |
| I-Resin | Kuyi-polymers engasebenzi kahle, futhi isebenza njengezibopho zokubamba izinto ezahlukene ku-photoresist ndawonye, okunikeza i-photoresist izakhiwo zayo zemishini nezamakhemikhali. |
| I-Monomer | Yaziwa nangokuthi ama-diluent asebenzayo, ama-molecule amancane aqukethe amaqembu asebenzayo angenziwa nge-polymerizable futhi angama-compounds anesisindo esincane sama-molecule angabamba iqhaza ekuphenduleni kwe-polymerization ukuze akhe ama-resin anesisindo esiphezulu sama-molecule. |
| Okungeziwe | Isetshenziselwa ukulawula izakhiwo ezithile zamakhemikhali zama-photoresist. |
Ama-Photoresist ahlukaniswa ngezigaba ezimbili eziyinhloko ngokusekelwe esithombeni abasakhayo: esihle nesibi. Ngesikhathi senqubo ye-photoresist, ngemva kokuchayeka nokuthuthukiswa, izingxenye eziveziwe zengubo ziyancibilika, kushiye izingxenye ezingachayekanga. Lokhu kuchayeka kubhekwa njenge-photoresist enhle. Uma izingxenye eziveziwe zihlala kuyilapho izingxenye ezingachayekanga zincibilika, ingubo ibhekwa njenge-photoresist embi. Kuye ngomthombo wokukhanya ochayekayo kanye nomthombo wokukhanya, ama-photoresist ahlukaniswa kabanzi njenge-UV (kufaka phakathi ama-photoresist amahle nangalungile e-UV), ama-photoresist ajulile e-UV (DUV), ama-photoresist e-X-ray, ama-photoresists e-electron beam, kanye nama-photoresists e-ion beam.
I-Photoresist isetshenziswa kakhulu ekucubungulweni kwamaphethini acwebezelayo kumaphaneli okubonisa, amasekethe ahlanganisiwe, namadivayisi e-semiconductor ahlukene. Ubuchwepheshe bokukhiqiza ngemuva kwe-photoresist buyinkimbinkimbi, bunezinhlobo eziningi zemikhiqizo kanye nezincazelo. Ukukhiqizwa kwamasekethe ahlanganisiwe embonini ye-elekthronikhi kubeka izidingo eziqinile ku-photoresist esetshenziswayo.
I-Ever Ray, umkhiqizi onolwazi lweminyaka engama-20 ogxile ekukhiqizweni nasekuthuthukisweni kwama-resin alulamayo, uqhosha ngomthamo wokukhiqiza waminyaka yonke wamathani angu-20,000, umugqa womkhiqizo ophelele, kanye nekhono lokwenza ngezifiso imikhiqizo. Ku-photoresist, i-Ever Ray ine-resin engu-17501 njengengxenye eyinhloko.
